Body with magnetic film attached and manufacturing method therefor

ABSTRACT

A fabrication method for fabricating a magnetic film provided body includes preparing a base body and forming a magnetic film on the base body. The magnetic film includes organic film(s) and ferrite film(s) alternately layered. The formation of the magnetic film alternately includes forming a ferrite film through a ferrite plating method, the ferrite film having a thickness of 20 μm or less, and forming an organic film having a thickness of 0.1 μm to 20 μm, both inclusive, and a ratio t/E of 0.025 μm/GPa or more, where “t” indicates the thickness of the organic film while “E” indicates Young&#39;s modulus of the organic film.

TECHNICAL FIELD

This invention relates to a magnetic film provided body and afabrication method thereof, wherein the magnetic film provided body isformed of a base body provided with a magnetic film, especially, aspinel-structured ferrite film.

BACKGROUND ART

A ferrite plating method provides a fine quality ferrite film and is,for example, disclosed in Patent Document 1. The ferrite plating methodcomprises the steps of: preparing a specific solution containing atleast ferrous ions; bringing a surface of a base body into contact withthe specific solution to cause Fe²⁺ ions, or Fe²⁺ ions and other metalhydroxide ions, to be absorbed on the surface of the base body; andoxidizing the absorbed Fe²⁺ ions to obtain Fe³⁺ ions to cause the Fe³⁺ions and metal hydroxide ions in the specific solution to undergo aferrite crystallization reaction so that a ferrite film is formed on thesurface of the base body.

The above-described ferrite plating method allows use of any kinds ofbase bodies, provided that the base bodies have tolerance to thesolution. The ferrite plating method can produce a spinel-structuredferrite film under a relatively low temperature (the normal temperatureto the boiling point of the solution or lower) because it is based onthe reaction by using the solution. The ferrite plating method issuperior to other ferrite film formation techniques in fewer limitationsfor the base body. The ferrite film formed through the ferrite platingmethod is superior in that the ferrite film, which is of ceramics, hasflexibility and is easy to handle.

There are provided Patent Document 2 to Patent Document 6 and Non-PatentDocument 1 as documents concerning the ferrite plating method. PatentDocument 2 discloses a technique which homogenizes ferrite films formedand increases reaction rate in a ferrite film formation process. PatentDocument 3 discloses a technique which makes a surface of a base bodydenatured and active by plasma processing so that ferrite films can beformed on the various base bodies. Patent Document 4 discloses atechnique which relates to increasing ferrite film formation rate.Patent Document 5 discloses a technique which improves an insulationproperty of a ferrite film or a support body by coating the ferrite filmor the support body with an insulation material. Patent Document 6discloses a technique which relates to a ferrite thin film having highmagnetic permeability over a wide frequency range. Patent Document 7discloses a technique of forming a magnetic film (a ferrite film) bylaminating strain-relaxation chemical compound layers andferrite-constituent atom layers. Non-Patent Document 1 discloses atechnique which relates to a noise-suppressor using the ferrite thinfilm based on the technique of Patent Document 6.

-   Patent Document 1: JPA S59-111929-   Patent Document 2: JPA S60-140713-   Patent Document 3: JPA S61-030674-   Patent Document 4: JPA H02-166311-   Patent Document 5: JPA 2005-298875-   Patent Document 6: JPA 2005-191098-   Patent Document 7: JPA H1-122929

Non-Patent Document 1: “GHz Conducted Noise Suppression Effects byFerrite Thin Films Plated onto Polyimide Sheet”, NEC TOKIN TechnicalReview vol. 31, p. 92, 2004; Koichi Kondo, Tatsuya Chiba, Hiroshi Ono,Shigeyoshi Yoshida and Masanori Abe

DISCLOSURE OF INVENTION Problems to be Solved by Invention

According to Patent Document 7, an exfoliation would not occur even whena thickness of the magnetic film is more than two micro meters. However,depending on the forming conditions, the magnetic film would beexfoliated from a base body or the magnetic film itself would be damagedin a case where the thickness is more than two micro meters

It is therefore an object of the present invention to determine anoptimum forming condition of providing a magnetic film on a base bodyand to provide a fabrication method of a magnetic film provided body inwhich no exfoliation occurs even when a thickness of the magnetic filmis more than two micro meters.

In addition, it is another object of the present invention to provide amagnetic film provided body which is fabricated in accordance with theabove-mentioned fabrication method thereof.

Means for Solving the Problems

One aspect of the present invention provides a fabrication method of amagnetic film provided body comprising preparing a base body and forminga magnetic film on the base body. The magnetic film comprises organicfilm(s) and ferrite film(s) alternately layered. The formation of themagnetic film alternately carries out: forming a ferrite film through aferrite plating method, the ferrite film having a thickness of 20 μm orless; and forming an organic film, the organic film having a thicknessof 0.1 μm to 20 μm, both inclusive. The organic film has a ratio t/E of0.025 μm/GPa or more, where “t” indicates the thickness of the organicfilm, and “E” indicates Young's modulus of the organic film.

Another aspect of the present invention provides a magnetic filmprovided body comprising a base body and a magnetic film provided on thebase body. The magnetic film comprises organic film(s) and ferritefilm(s) alternately layered and an adhesive strength between the organicfilm and the ferrite film is 0.1 kN/m or more.

Advantageous Effect of Invention

According to the present invention, by determining an optimum condition,a magnetic film which has a high adhesive strength can be formed on abase body, wherein the magnetic film comprises an organic film(s) and aferrite film(s).

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a cross-sectional view schematically showing a magnetic filmprovided body according to an embodiment of the present invention.

FIG. 2 is a view schematically showing a film formation apparatus whichis used in a fabrication method of the magnetic provided body accordingto an embodiment of the present invention.

FIG. 3 is a cross-sectional view schematically showing a variationexample of the magnetic film provided body of FIG. 1.

FIG. 4 is a view schematically showing an examination method of adhesivestrength.

FIG. 5 is a view schematically showing an examination method offlexibility.

DESCRIPTION OF NUMERALS

-   -   1 Reaction Solution Nozzle    -   2 Oxidizing Solution Nozzle    -   3 Base body    -   4 Turn Table    -   5, 5 a Magnetic Film    -   6 Organic Film    -   7 Ferrite Film    -   10, 10 a Magnetic Film Provided Body    -   20 Stage    -   22 Double-sided Tape    -   24 PET Film    -   30 Mount Plate    -   32 Vibration Plate    -   R Bending Radius

BEST MODE FOR CARRYING OUT INVENTION

As shown in FIG. 1, a magnetic film provided body 10 according to anembodiment of the present invention comprises a base body 3 and amagnetic film 5 provided on the base body 3. The magnetic film 3comprises organic films 6 and ferrite films 7 alternately layered. Anadhesive strength between the organic film 6 and the ferrite film 7 is0.1 kN/m or more. Especially, in the magnetic film provided body 10 ofthe present embodiment, it is not the ferrite film 7 but the organicfilm 6 which is formed directly on the base body 3. An adhesive strengthbetween the directly-formed organic film 6 and the base body 3 is 0.1kN/m or more, too. In the present embodiment, the adhesive strengthbetween the base body 3 and the organic film 6 as well as each adhesivestrength between the organic film 6 and the ferrite film 7 is 0.1 kN/mor more so that an exfoliation problem may not occur. The adhesivestrength in the embodiment is examined by the exfoliation test inconformance with JIS C5016 (test methods for flexible printed wiringboards).

In order that the adhesive strength between the layers to be 0.1 kN/m ormore, in the embodiment, optimum conditions of a thickness of theferrite film, a thickness of the organic film, and a ratio t/E aredefined as follows, where “t” indicates the thickness of the organicfilm 6, and “E” indicates Young's modulus of the organic film 6. First,the ratio of t/E of each organic film 6 is defined to be 0.025 μm/GPa ormore. By the use of the organic film 6 which satisfies the condition, asufficient stress relaxation effect can be obtained. In addition, thethickness of each ferrite film 7 is defined to be 20 μm or less, and theorganic film 6 which has a thickness of 0.1 μm or more is interposedbetween the ferrite films 7. Therefore, the above-mentioned adhesivestrength of 0.1 kN/m or more can be obtained. In consideration ofproductivity, the ratio of t/E is preferred to be 1000 μm/GPa or less. Atotal thickness of the ferrite films 7 included in the magnetic film 5is defined to be 1 μm or more so that the magnetic film 5 which producesa high electromagnetic effect can be obtained. The thickness of eachorganic film 6 is defined to be 20 μm or less so that a device whichuses the magnetic film provided body of the embodiment can beminiaturized.

There is no limitation for a material of the base body 3, provided thatthe material has tolerance to the solution. For example, the material ofthe base body 3 may be selected from a group consisting of: variouskinds of plastics such as polyimide sheet, polyethylene terephthalateand so on; various kinds of metals such as copper, nickel, silver, gold,tungsten, molybdenum, platinum, palladium, iron, iron alloy and so on;various kinds of organic layered sheets, in other words, various kindsof layered sheets such as paper epoxy, glass epoxy, grass polyester andso on; various kinds of glass; ceramics; and so on.

In the embodiment, a purpose of using the organic film 6 is not toinsulate between the ferrite films 7 nor between the ferrite film 7 andan external member. As for a material of the organic film 6, a materialhaving any specific electrical resistance may be used. For example, theorganic film 6 may be made of resin selected from a group consisting ofphenol resin, epoxy resin, melamine resin, urea resin, unsaturatedpolyester resin, polyimide, polyethylene, polypropylene, polyvinylchloride, polyvinylidene chloride, polystyrene, polyvinyl acetate, ABSresin, acrylic resin, polyamide, nylon, polyacetal, polycarbonate,polybutylene terephthalate, polyethylene terephthalate, polyphenylenesulfide, polysulfone, polyethersulfone, polyarylate, polymer liquidcrystal, polyamide-imide and one of these resin including metal powder.The organic film 6 may be made of resin which includes magnetic powder.For example, a material of the magnetic powder may be selected from agroup consisting of ferrite, Fe, Fe—Co alloy, Fe—Si alloy, Fe systemalloy such as Fe—Si—Al, Ni system alloy such as Ni—Fe alloy and so on.Furthermore, the organic film 6 may be a high dielectric constantmaterial made of resin which includes carbon or metal powder.

In the embodiment, there is no limitation to a film formation method ofthe organic film 6. For example, the organic film 6 may be formed byapplying a resin which has moderate fluidity by an applying apparatussuch as a spin coater, or the organic film 6 may be formed by a filmformation apparatus such as sputtering and so on.

In the embodiment, the ferrite film(s) 7 is formed through the ferriteplating method. A film formation apparatus, for example as shown in FIG.2, may be used for forming a ferrite plate. The illustrated filmformation apparatus is an apparatus for forming a ferrite film on thebase body 3 and comprises a reaction solution nozzle 1, an oxidizingsolution nozzle 2 and a turn table 4. The turn table 4 is a tableturnable around its axis. The base body 3 moves in response to theturning of the turn table 4. The reaction solution nozzle 1 isconfigured to supply a reaction solution for the turn table 4, whereinthe reaction solution contains at least ferrous ions (Fe²⁺ ions). Thereaction solution nozzle 1 is fixed above the turn table 4. Theoxidizing solution nozzle 2 is configured to supply an oxidizingsolution for the turn table 4, wherein the oxidizing solution containsat least an oxidizing agent. The oxidizing solution nozzle 2 is fixedabove the turn table 4. In the illustrated film formation apparatus, thereaction solution nozzle 1 is positioned above one of half regions ofthe turn table 4 stopped, while the oxidizing solution nozzle 2 ispositioned above the other half region of the turn table 4 stopped. Whenthe turn table 4 is turned with the reaction solution and the oxidizingsolution respectively supplied from the reaction solution nozzle 1 andthe oxidizing solution nozzle 2, the reaction solution and the oxidizingsolution are alternately supplied for the base body 3, and excessreaction solution and oxidizing solution are removed by centrifugalforce. As a result, the ferrite film based on the ferrite plating methodis formed on the base body 3. Compositions of the ferrite films 7 may bedifferent from each other.

In the embodiment, it is not the ferrite film 7 which is formed directlyon the base body 3. However, for example, a magnetic film provided body10 a may comprise a magnetic film 5 a formed by forming the ferrite film7 directly on the base body 3, as shown in FIG. 3. In this case, thebase body 3 may be made of an organic material. Similarly to the organicfilm 6, the organic material in this case is preferred to have a ratiot/E of 0.025 μm/GPa or more. In this manner, the adhesive strengthbetween the base body 3 made of the organic material and the organicfilm 7 directly formed thereon can be 0.1 kN/m or more. Furthermore, itis preferable to maintain a ratio of t/E of the organic material of thebase body 3 to be 1000 μ/GPa or less.

For a property examination of the magnetic film provided body, variousmagnetic film provided bodies were formed, as listed in the followingtable. In the table, each of concrete examples 1˜5 is a magnetic filmprovided body which satisfies a condition according to the presentembodiment, while each of comparative examples 1˜5 is a magnetic filmprovided body which does not satisfy the condition according to thepresent embodiment.

TABLE 1 Concrete Concrete Concrete Concrete Concrete Example 1 Example 2Example 3 Example 4 Example 5 Material and Ferrite 2 Ferrite 1Thickness(μm) of 6th Layer Material and Polyimide 1 Polyimide 0.1Thickness(μm) B A of 5th Layer Material and Ferrite 2 Ferrite 1 Ferrite0.5 Thickness(μm) of 4th Layer Material and Polyimide 1 Polyimide 0 1Polyimide 20 Ferrite  3 Ferrite  3 Thickness(μm) B A B of 3rd LayerMaterial and Ferrite 2 Ferrite 1 Ferrite 0.5 Polyimide  6 Epoxy + Fe 20Thickness(μm) of 2nd Layer Material and Polyimide 1 Polyimide 0.1Polyimide 20 Ferrite  3 Ferrite  3 Thickness(μm) B A B of 1st LayerMaterial and Glass 1000 Glass 1000 Glass 1000 Polyimide 25 Polyimide 25Thickness(μm) of Base Body Total Thickness 6 3 1 6 6 (μm) of the FerriteFilm Position of the between PET between PET between PET between PETbetween PET Existence and and and and and of Exfoliation Double-sidedDouble-sided Double-sided Double-sided Double-sided tape tape tape tapetape Adhesive >2.0 >2.0 >2.0 >2.0 >2.0 Strength between the Layers(kN/m) Young's Modulus 3 4 3 4 4 E GPa) of the Organic Film FilmThickness 1 0.1 20 6 20 t(μm) of the Organic Film t/E (pm/GPa) 0.330.025 6.67 1.5 5 Occurrence of the — — — No No Exfoliation afterExfoliation Exfoliation Bending Test (100,000 tirnes) ComparativeComparative Comparative Comparative Example 1 Example 2 Example 3Example 4 Material and Thickness(μm) of 6th Layer Material andThickness(μm) of 5th Layer Material and Thickness(μm) of 4th LayerMaterial and Thickness(μm) of 3rd Layer Material and Ferrite   25Ferrite 18 Thickness(μm) of 2nd Layer Material and Polyimide    2Ferrite    5 Polyimide 0.05 Ferrite  6 Thickness(μm) A A of 1st LayerMaterial and Glass 1000 Glass 1000 Glass 1000 Polyimide 25 Thickness(μm)of Base Body Total Thickness 25 5 18 6 (μm) of the Ferrite Film Positionof the between 1st between between between Existence layer and Base BodyBase Body Base Body of Exfoliation 2nd layer and and and 1st layer 1stlayer lst layer Adhesive 0.05 Exfoliation 0.09 1 Strength between Occursthe Layers before the (kN/m) Test Young's Modulus 4 — 4 — E GPa) of theOrganic Film Film Thickness 2 — 0.05 — t(μm) of the Organic Film t/E(pm/GPa) 0.5 — 0.01 — Occurrence of the — — — Exfoliation Exfoliationafter Occurs Bending Test (100,000 tirnes)

Hereinafter, a supplemental explanation will be made about a size and afabrication condition of each of the examples listed in the table.

A size of the base body 3 made of the glass substrate is 50 mm×50 mm×1mm. A size of the base body 3 made of the polyimide sheet is 50 mm×50mm×25 mm. The former corresponds to the concrete example 1˜3 and thecomparative example 1˜3. The latter corresponds to the concrete example4 and 5 and the comparative example 4.

In the above-mentioned examples of the organic films 6, “Polyimide A” isa polyimide film which has relatively high Young's modulus (Young'smodulus of 4 GPa), and “Polyimide B” is a polyimide film which hasrelatively low Young's modulus (Young's modulus of 3 GPa). Anexplanation will be made for a forming method of the polyimide film withtaking an example where the polyimide film is formed on a glasssubstrate. First, a dilute agent was added into and mixed with polyamicacid of a precursor of polyimide. Secondly, the aforementioned mixturewas applied on a surface of the glass substrate by a spin coater. Anapplication thickness was adjusted by viscosity of a solution, thenumber of revolutions of the spin coater, and so on. After that, theglass substrate applied with the solution was heated at 90° C. for 5minutes, followed by heated at 320° C. for 60 minutes. Thus, thepolyimide film was formed on the glass substrate. By adjusting theformation conditions, the organic films 6 can be obtained wherein theorganic films 6 is made of the polyimide A of high Young's modulus (4GPa) or the polyimide B of low Young's modulus (4 GPa).

The organic film 6 of the concrete example 5 is a mixture of epoxy resinand Fe. As for the organic film 6, Fe particle was mixed intopre-polymer of epoxy resin, wherein Fe particle has an average particlediameter of 3 μm and the Fe content was 45 vol %, and thereafter acuring agent was mixed. Next, the mixture was applied so that an averagethickness is 2 μm. Furthermore, the applied film was maintained at 100°C. for 6 hours and cured. A specific resistance of the mixture of epoxyresin and Fe formed in the above-described manner was 100 Ωcm.

The ferrite film 7 was formed as follows. As a pre-treatment, a turntable 4 was turned after the base body 3 was disposed on the turn table4, while deoxidized ion-exchange water was provided on the base body 3under a heat treatment up to 90° C. Next, nitrogen gas was introducedinto the film formation apparatus so that deoxide atmosphere wasprepared in the apparatus. Then, the step of supplying the reactionsolution for the base body 3 from the reaction solution nozzle 1 and thestep of supplying the oxidizing solution for the base body 3 from theoxidizing solution nozzle 2 were carried out while the turn table 4 wasturned. In other words, the step of supplying the reaction solution andthe step of supplying the oxidizing solution were carried outalternately and repeatedly. Here, flow rate upon the supply of each ofthe reaction solution and the oxidizing solution was set to 40 ml/min.The reaction solution was prepared by dissolving FeCl₂-4H₂O, NiCl₂-6H₂Oand ZnCl₂ into deoxidized ion-exchange water. The oxidizing solution wasprepared by dissolving NaNO₂ and CH₃COONH₄ into deoxidized ion-exchangewater. The reaction solution and the oxidizing solution may be formedwith reference to, for example, US2009-0047507A1, US2007-0231614A1, orother materials. Here, the explanation was made with taking an examplewhere the ferrite film 7 was formed on the base body 3. Similar methodwas carried out for a case where the ferrite film 7 was formed on theorganic film 6.

Chemical composition of each ferrite film of the concrete example 1˜5and the comparative example 1˜4 as listed on the table was examined byan inductively coupled plasma spectroscopy (ICPS) method. As a result,each of the ferrite films has an average composition ofNi_(0.2)Zn_(0.3)Fe_(2.5)O₄. A scanning electron microscope (SEM) wasused for a configuration analysis such as measurement of film thickness.

An examination of the adhesive strengths was carried out in conformancewith JIS C5016 (test methods for flexible printed wiring boards). Peelstrength was taken as the adhesive strength. In detail, as shown in FIG.4, the obtained magnetic film provided body 10 was fixed on a stage 20with a double-sided tape 22. A PET film 24 was stuck to the top layer ofthe ferrite film 7 by a double sided tape 22. In this state, the PETfilm was peeled off in the 90° direction. By recording a position ofexfoliation occurred between the layers and the scale on a force gagesat that time, the value of the scale was taken as the adhesive strength.

An examination of the flexibility was carried out in conformance withJIS C5016 (a test method for flexible printed wiring boards). In detail,as shown in FIG. 5, the obtained magnetic film provided body 10 wasbent, where the bending radius R was 3 mm. End portions of the magneticfilm provided body 10 was fixed to a mount plate 30 and a vibrationplate 32, respectively. In this state, a bending test was carried outfor the vibration plate 32 which was subjected to the reciprocatingmotion for a hundred-thousand times, where each stroke is 30 mm and eachreciprocate cycle is twice per second. After the bending test of thereciprocating motion for 100 thousand times, a visual examination wascarried out to check the occurrence of the exfoliation between anylayers. When there was no exfoliation as a result of the examination,flexibility was judged to be fine. The bending test was carried out onlyfor the magnetic film provided body of which the base body is polyimide,as the glass substrate cannot be bent. The results of the examinationsare also listed on the aforementioned tables.

It is obvious from the tables that for the magnetic film provided bodiesof the concrete examples 1˜5, each adhesive strength between the organicfilm 6 and the ferrite film 7 is 0.1 kN/m or more because each organicfilm 6 has a thickness of 0.1 μm to 20 μm, both inclusive; each ferritefilm(s) 7 has a thickness of 20 μm or less; and a ratio t/E is of 0.025μm/GPa or more, where “t” indicates the thickness of the organic film,and “E” indicates Young's modulus of the organic film. Accordingly, noexfoliation occurs in the magnetic film provided body 10.

On the other hand, for the magnetic film provided bodies of comparativeexamples 1˜3, each adhesive strength in the magnetic film providedbodies are 0.1 kN/m or less because the condition such as thickness ofthe organic films, Young's modulus and thickness of the ferrite are notsatisfied. This results in occurrence of the exfoliation between anylayers of the magnetic film provided body 10. In the comparative example4, exfoliation occurred after the 100 thousand times of the bendingtest. This is caused by the single layered ferrite film 7 formed on thebase body 3 made of the organic material.

INDUSTRIAL APPLICABILITY

A ferrite provided body according to the present invention can be usedin an inductance element, an impedance element, a magnetic head, amicrowave element, a magnetostriction element and a high-frequencymagnetic device such as an electromagnetic interference suppressor.Especially, it is suitable in the case where the magnetic film includingthe ferrite film is required to be relatively thick. The electromagneticinterference suppressor is for suppressing electromagnetic problemscaused by interferences of undesired electromagnetic waves in a highfrequency region.

1. A fabrication method of a magnetic film provided body comprising:preparing a base body and forming a magnetic film on the base body, themagnetic film comprising at least one organic film and at least oneferrite film alternately layered, wherein the formation of the magneticfilm alternately out comprises: forming a ferrite film through a ferriteplating method, the ferrite film having a thickness of 20 μm or less;and forming an organic film, the organic film having a thickness of 0.1μm to 20 μm, both inclusive, the organic film having a ratio t/E of0.025 μm/GPa or more, where “t” indicates the thickness of the organicfilm, and “E” indicates Young's modulus of the organic film.
 2. Thefabrication method as recited in claim 1, wherein the formation of themagnetic film includes forming one layer of the organic film on the basebody.
 3. The fabrication method as recited in claim 1, wherein theformation of the magnetic film includes forming one layer of the ferritefilm on the base body.
 4. A magnetic film provided body comprising: abase body; and a magnetic film provided on the base body, wherein: themagnetic film comprises at least one organic film and at least oneferrite film alternately layered; and an adhesive strength between theorganic film and the ferrite film is 0.1 kN/m or more.
 5. The magneticfilm provided body as recited in claim 4, wherein: the organic film ofthe magnetic film is provided directly on the base body; and an adhesivestrength between the organic film and the base body is 0.1 kN/m or more.6. The magnetic film provided body as recited in claim 4, wherein: thebase body is made of organic material; the ferrite film of the magneticfilm is provided directly on the base body; and an adhesive strengthbetween the ferrite film and the base body is 0.1 kN/m or more.
 7. Themagnetic film provided body as recited in claim 4, wherein: each ferritefilm has a thickness of 20 μm; each organic film has a thickness of 0.1μm to 2.0 μm, both inclusive; and the organic film has a ratio t/E of0.025 μm/GPa or more, where “t” indicates the thickness organic film,and “E” indicates Young's modulus of the organic film.
 8. The magneticfilm provided body as recited in claim 7, wherein a total thickness ofthe at least one ferrite film included in the magnetic film is 1 μm ormore.
 9. The magnetic film provided body as recited in claim 4, whereinthe ferrite film(s) is one formed through a ferrite plating method.